AMCAD’ pulsed IV/ RF characterization system can control a semi-automatic prober, allowing to rapidly and automaticly characterize a entire wafer.
Wafer-mapping the DC/ RF parameters allows process variations to be plotted across the wafer and better understood.
Video below shows how to use this wafer mapping plugin to display Idss distribution on a wafer map, and to highlight trapping effects distribution (gate lag and drain lag).
(5 minutes Flash Video)